分子篩吸附泵molecularsieveadsorptionpump分離因數separationfactor止回閥checkvalve水蒸汽噴射真空泵steamejectionvacuumpump水輪泵turbine-pump水錘泵hydraulicrampump半導體制冷器thermalelectricalrefrigerator外壓容器externalpressurevessel石墨換熱器graphiteheatexchanger安全閥safetyvalve自由活塞壓縮機free-pistoncompressor低溫泵cryopump低溫壓力容器lowtemperaturepressurevessel吸收式制冷機absorptionrefrigeratingmachine吸氣劑離子泵getterionpump夾管閥pinchvalve沉降離心機sedimentationcentrifuge刮面式換熱器scrapedsurfaceheatexchanger往復活塞壓縮機reciprocating-pistoncompressor往復真空泵pistonvacuumpump板式換熱器plateheatexchanger板翅式換熱器plate-finheatexchanger板殼式換熱器lamellaheatexchanger波紋管閥bellowsvalve油擴散泵oildiffusionpump油擴散噴射泵oildiffusionejectorpump空氣分離設備airseparationplant空氣冷卻器aircooledheatexchanger空氣調節設備air-conditioningequipment室式分離機multi-chamberseparator柱塞泵plungerpump氟塑料換熱器flexible-tubeheatexchanger活塞泵pistonpump玻璃換熱器glassheatexchanger計量泵meteringpump套管式換熱器double-pipeheatexchanger射流泵jetpump氣體分離設備gasseparationplant氣體液化設備gasliquifactionplant浮球調節閥floatadjustingvalve真空檢漏vacuumleakdetection?熱式氣體制冷機regeneratorgasrefrigerator高溫壓力容器hightemperaturepressurevessel動態過濾機dynamicfilter帶式真空過濾機beltfilter排空氣閥airvalve斜流通風機mixed-flowfan旋片真空泵sliding-vanerotaryvacuumpump旋渦泵regeneratingpump旋塞閥plugvalve液環真空泵liquidringvacuumpump液環壓縮機liquidringcompressor混合式換熱器mixingheatexchanger深低溫液化氣體貯槽cryogenicstoragevessel深低溫精餾塔cryogenicrectificationcolumn球形壓力容器sphericalpressurevessel球閥ballvalve疏水閥steamtrapvalve蛇管式換熱器serpentinetypeheatexchanger傘板換熱器umbrellatypeplateheatexchanger